Industries Served

Industries Served Semiconductor/LCD Bell Jars (Domes)

bellhars

BELL JARS (DOMES)

During wafer etching, loose conductive particles need to be collected such as to not cause circuitry failures later in the process.  Commonly, yttrium oxide is used as an ultra-pure coating to capture and retain the particulates.  The interior process area is coated with Yttria using a method to produce a high surface roughness which can be left in the as-sprayed condition.