Industries Served

Industries Served Semiconductor/LCD Deposition Shields & PVS Liner

DEPOSITION SHIELDS & PVS LINERS

Physical Vapor Deposition chambers exhibit a high content of loose particles.  Depo shields and liners reduce the particle count by entrapping and retaining them in the coating, and therefore are considered active shields for generating a plasma for sputtering.  The coated shields also act as a heat sink to accept radiation from the RF antenna heat source.