Industries Served

Industries Served Semiconductor/LCD Electrostatic Chucks (ESC)

Electrostatic Chucks (ESC)

Performance is enhanced when high-purity, dielectric coatings are applied in a very dense, highly durable layer.  APS Materials coatings provide a long operating life, high breakdown voltage (4000+ volts), as well as comparatively short de-chucking times. APS has served this industry with high-purity ceramic dielectric coatings for over 10 years, and our expertise in this field is unsurpassed.