Industries Served

Industries Served Semiconductor/LCD Ion Beam Implantation Masks

ionbeamION BEAM IMPLANTATION WAFER MASKS

Industry particle accelerator components need to be protected from the ion beam. APS Materials offers a nearly contaminant-free Tungsten metallic coating at just the right density for wafer masks, transmission housings, and cups, which offers protection up to 10-60 MeV, and beam powers up to 25 kW.