Pedestals

Maintaining the dielectric properties of your pedestal is essential to the de-chucking process.  Corrosion of the substrate will cause dielectric loss, as well as damage to your equipment.  APS supplies a 4n purity Aluminum Oxide or Yttrium Oxide coating to prevent dielectric loss and extend component life.  Pedestals can be ground, lapped, and polished after coating for a smooth vacuum sealing surface.