Industries Served

Industries Served Semiconductor/LCD Viewpoint & Aperature Windows

viewportsViewpoint & Aperature Windows

A viewport window in a chemical vapor deposition chamber prevents heat loss during the plasma deposition process.  Since the window serves as wall of CVD chamber, the substrate needs to be coated for insulation and corrosion protection, while still allowing for the integral heating element to function properly.  APS Materials offers alumina coatings to insulate and protect against the tendency of polymer to adhere to the window.