Services

CERAMIC COATING FOR INDUSTRY

The unique and beneficial characteristics of APS’ thermal sprayed ceramic coating provide chemical, abrasion, erosion, and/or corrosion resistance, as well as enhanced thermal conductivity heat resistance to semiconductors that must endure a harsh manufacturing process.

BELL JARS, DOMES, DEPOSITION RINGS, BAFFLE PLATES

APS Materials, Inc. is experienced in applying a variety of different coatings to a wide range of semiconductor equipment components. Custom coatings are frequently engineered by APS in order to meet the specific requirements of a new or unusual application. There are numerous cases where a plasma spray coated metal component provided a more durable, less costly alternative to a solid ceramic, quartz, carbide or nitride part.

PVD/CVD METAL ETCH CHAMBERS

A proprietary plasma spray coating engineered by APS Materials is currently being used as corrosion resistance in metal etch chambers. This coating extends the overall life of etch chambers by more than 30 times, compared to conventional coating or anodizing.

E-CHUCKS

The semiconductor industry utilizes APS’ thermal sprayed ceramics for dielectric layers on metal electrostatic chucks. APS has served this industry with high-purity ceramic dielectric coatings for over 5 consecutive years and our expertise in this field is unsurpassed.

Dielectric materials:

  • Al203 (Alumina)
  • Y2O3 (Yttria)
  • Al2O3/TiO2 (Alumina-Titania)
  • Y2O3/AlO3 (Yttria-Alumina)