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DPS CHAMBERS & LINERS
BAFFLES
BALL VALVE COMPONENTS
BELL JARS (DOMES)
BELLOWS & COVERS
DEPOSITION SHIELDS & PVS LINER
ELECTRODES
ELECTROSTATIC CHUCKS (ESC)
FIXED CLIP RESTRAINTS
HARDWARE – FASTENERS
SHUTTERS & SLEEVES
ION BEAM IMPLANTATION MASKS
MAGNET PLATES & COVERS
PEDESTALS
QUARTZ
SHOWERHEADS (GDP)
SLIT VALVES
SPUTTERING TARGETS
VIEWPOINT/APERATURE WINDOWS
WAFER COATINGS
DPS Chambers & Liners

Full Refurbishment for Metal & Poly Etch DPS Upper Chambers 200mm/300mm: 0021-01421, 0040-02544, 0040-52662, 0020-33806, 0021-09601, and 0020-33802 originally provided with the A-Coat. APS Materials engineered several proprietary coatings starting in 1994, used by OEMs and Second-Source suppliers to protect de-coupled plasma source (DPS) process chambers in severe etch environments. Anodizing alone will not protect your chamber for very long, but adding one of our available Metal-Etch and Poly-Etch coatings will increase the chamber life by 10 times, and in some cases, up to 30 times longer than anodize alone. Full refurbishment is available, as well as a core-exchange for 3-day lead times.

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Baffles

Laminar gas flow through holes or slots can only be accomplished by uniform, repeatable known thicknesses and patterns. APS Materials coatings provide corrosion and erosion resistance, enhanced thermal insulation, and conductivity or dielectric properties depending on the application.

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Baffles

Laminar gas flow through holes or slots can only be accomplished by uniform, repeatable known thicknesses and patterns. APS Materials coatings provide corrosion and erosion resistance, enhanced thermal insulation, and conductivity or dielectric properties depending on the application.

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Ball Valve Components

Deposits, corrosion, or erosion on a ball valve or seat will eventually result in downtime or loss of product from the seal failure. APS Materials utilizes one of the very few Vacuum Plasma Systems in the US to apply thin, highly-adhered coatings to internal valve components which can be ground & lapped to extend the valve life.

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Bell Jars (Domes)

During wafer etching, loose conductive particles need to be collected such as to not cause circuitry failures later in the process. Commonly, yttrium oxide is used as an ultra-pure coating to capture and retain the particulates. The interior process area is coated with Yttria using a method to produce a high surface roughness which can be left in the as-sprayed condition.

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Bellows & Covers

High-vacuum bellows covers will eventually be attached by the etch environment as the wafers the conveyed through the chambers. Whether interior or exterior coating is required, alumina coatings have long been considered the standard for increasing bellows lifetimes and maintaining vacuum abilities.

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Deposition Shields & PVS Liner

Physical Vapor Deposition chambers exhibit a high content of loose particles. Depo shields and liners reduce the particle count by entrapping and retaining them in the coating, and therefore are considered active shields for generating a plasma for sputtering. The coated shields also act as a heat sink to accept radiation from the RF antenna heat source.

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Deposition Shields & PVS Liner

Physical Vapor Deposition chambers exhibit a high content of loose particles. Depo shields and liners reduce the particle count by entrapping and retaining them in the coating, and therefore are considered active shields for generating a plasma for sputtering. The coated shields also act as a heat sink to accept radiation from the RF antenna heat source.

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Electrodes

Upper and Lower electrodes require dielectric coatings to keep the plasma environment functioning. High-purity grade aluminum oxide will maintain dielectric integrity throughout each production cycle.

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Electrostatic Chucks (ESC)

Performance is enhanced when high-purity, dielectric coatings are applied in a very dense, highly durable layer. APS Materials coatings provide a long operating life, high breakdown voltage (4000+ volts), as well as comparatively short de-chucking times. APS has served this industry with high-purity ceramic dielectric coatings for over 10 years, and our expertise in this field is unsurpassed.

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Fixed Clip Restraints

Devices used for handling silicon wafers are the last line of defense for preserving the contaminant-free circuitry needed during and after the etching process. APS Materials uses 5n purity and higher silicon (99.999%) to coat the finger-tip ends which contact the critical components.

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Hardware – Fasteners

A necessary component of any assembly, fasteners of all types corrode from the harsh process environment, and surface erosion allows loose particles to contaminate your products. APS Materials can apply thin coatings to protect screw heads, washers, nuts, and other fasteners with protective materials such as pure aluminum or zinc.

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Shutters & Sleeves

Whether your cathode sleeve or shutter plate needs corrosion protection or a coating to serve as retention material for loose particles, APS Materials’s pure aluminum oxide and yttrium oxide are the coatings of choice. High-purity silica or Spinel (magnesium oxide & alumina) can also increase shutter substrate life.

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Ion Beam Implantation Masks

Industry particle accelerator components need to be protected from the ion beam. APS Materials offers a nearly contaminant-free Tungsten metallic coating at just the right density for wafer masks, transmission housings, and cups, which offers protection up to 10-60 MeV, and beam powers up to 25 kW.

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Magnet Plates & Covers

A common application for magnet plates is to remove ferrous impurities before they enter the chamber. APS Materials offers an ultra-pure silicon coating to protect magnet plates and covers from corrosion offer a retention material to hold the loose contaminant particles and protect your rare-earth element magnets.

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Pedestals

Maintaining the dielectric properties of your pedestal is essential to the de-chucking process. Corrosion of the substrate will cause dielectric loss, as well as damage to your equipment. APS supplies a 4n purity Aluminum Oxide or Yttrium Oxide coating to prevent dielectric loss and extend component life. Pedestals can be ground, lapped, and polished after coating for a smooth vacuum sealing surface.

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Pedestals

Maintaining the dielectric properties of your pedestal is essential to the de-chucking process. Corrosion of the substrate will cause dielectric loss, as well as damage to your equipment. APS supplies a 4n purity Aluminum Oxide or Yttrium Oxide coating to prevent dielectric loss and extend component life. Pedestals can be ground, lapped, and polished after coating for a smooth vacuum sealing surface.

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Quartz

Preparation of quartz substrates for thermal spray coatings is a delicate process, but is one that has been perfected at APS Materials. Coatings which can be coated directly onto quartz include Alumina, Yttria, Zirconia, and Silica. Additional coatings have been coated onto quartz with the use of a thin bonding coat applied to the substrate, making the coating possibilities endless.

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Showerheads (GDP)

Uniform laminar flow of etch gas across the wafer is crucial. APS Materials has perfected the coating of Gas Distribution Panels, or showerheads, to coat the through-holes to the customer’s exact specifications. Whether a taper is desired, fully-coated holes, or no overspray coating at all, APS Materials can tailor the coating to your requirements.

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Slit Valves

Openings to a vacuum process chamber are especially prone to corrosion and contamination. APS offers the standard oxide coatings, in addition to pure silicon and silicon dioxide. The Viton o-ring is preserved due to the extensive masking techniques and workmanship.

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Sputtering Targets

PVD operation depends on clean sputtering targets with a retention ring to trap loose particles. APS Materials offers a pure aluminum arc spray coating which produces a ring of up to 5 times the uncoated surface area, and a high bond strength of about 7,000 psi to the substrate. APS also coats pure tantalum, molybdenum, and copper.

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Sputtering Targets

PVD operation depends on clean sputtering targets with a retention ring to trap loose particles. APS Materials offers a pure aluminum arc spray coating which produces a ring of up to 5 times the uncoated surface area, and a high bond strength of about 7,000 psi to the substrate. APS also coats pure tantalum, molybdenum, and copper.

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Viewpoint & Aperature Windows

A viewport window in a chemical vapor deposition chamber prevents heat loss during the plasma deposition process. Since the window serves as wall of CVD chamber, the substrate needs to be coated for insulation and corrosion protection, while still allowing for the integral heating element to function properly. APS Materials offers alumina coatings to insulate and protect against the tendency of polymer to adhere to the window.

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Wafer Coatings

Silicon wafer coatings recently introduced by APS Materials have applications in both semiconductor and the photovoltaic markets. Ultra-pure silicon coatings deposited up to 2mm in thickness have been achieved at APS with high-tensile strength, low warpage (bow), and high density. The wafers can then be faced and ground to the correct thickness, leaving a disc of pure silicon remaining.

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Wafer Coatings

Silicon wafer coatings recently introduced by APS Materials have applications in both semiconductor and the photovoltaic markets. Ultra-pure silicon coatings deposited up to 2mm in thickness have been achieved at APS with high-tensile strength, low warpage (bow), and high density. The wafers can then be faced and ground to the correct thickness, leaving a disc of pure silicon remaining.

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READY TO GET STARTED?

APS provides lasting protection and restoration that keeps equipment moving. From thermal sprays to ceramic, metallic, and CeraNode coatings, APS has a solution. Contact our team to discover the best solution to protect your materials.

PROTECT & RESTORE