Industries

Electronics

Precision-applied ceramic and specialty coatings that protect semiconductor equipment, reduce contamination, and promote process reliability.

Ceramic coating applied to quartz rods for semiconductor equipment

Protecting Electronic Components Is Our Priority

For more than 25 years, APS Materials has partnered with semiconductor OEMs and second-source suppliers to apply thermal spray coatings for fabrication equipment, power electronics, and advanced manufacturing systems. Our coating technologies help minimize contamination, resist plasma attack, and maximize hardware longevity in highly controlled production environments.

Semiconductor DPS chamber prepared for ceramic coating
Watch
Inside Our Electronics Coating Process

A short look at how APS applies ceramic and specialty coatings to semiconductor and electronics components, from surface preparation through final inspection.

APS Materials electronics coatings overview (1:40).

Common Components We Coat

This is a partial list of parts we can spray. Contact us for a quote or to inquire about our capabilities for specific parts.

  • Baffles
  • Bell Jars
  • Bellows & Covers
  • Depo Shields
  • DPS Chambers
  • Electrodes
  • Electrostatic Chucks
  • Pedestals
  • Shutters & Sleeves
  • Sputtering Targets

How Thermal Spray Supports Electronics Manufacturing

Corrosion and Plasma Resistance

High-purity ceramic coatings such as yttria and alumina create durable barriers against corrosive chemistries and aggressive plasma exposure. These coatings help preserve component integrity, stabilize process conditions, and reduce unplanned maintenance.

Particle Reduction and Contamination Control

Dense ceramic surfaces minimize particle generation, reduce coating degradation, and maintain surface integrity throughout repeated process cycles. Cleaner process chambers contribute to lower defect rates and improved manufacturing consistency.

Enhanced Dielectric Performance

Electrostatic chucks, RF hardware, and high-voltage assemblies rely on dielectric coatings for reliable operation. Thermal-sprayed ceramics provide electrical insulation, high breakdown voltage, and dependable performance under continuous use.

Longer Component Lifetimes and Reduced Costs

Thermal spray coatings help mitigate erosion, chemical attack, and surface degradation, reducing replacement frequency and lowering total ownership costs for semiconductor equipment.

Common Thermal Spray Coatings for Electronics Applications

Alumina (Al₂O₃)
Provides strong dielectric properties, thermal stability, and erosion resistance for semiconductor processing equipment and electrically insulating surfaces.
Yttria (Y₂O₃)
Offers excellent resistance to fluorine-based plasma chemistries and low particle generation in semiconductor etch applications.
Alumina-Titania (Al₂O₃–TiO₂)
Combines electrical insulation with increased toughness and wear resistance for components exposed to mechanical and process-related stresses.
Boron Carbide (B₄C)
Delivers exceptional hardness and erosion resistance in particle-intensive semiconductor processing environments.
Yttria-Stabilized Zirconia (YSZ)
Provides thermal shock resistance and stability under repeated thermal cycling and elevated operating temperatures.
Plasma spray coating a semiconductor bell jar

Reliability at the Surface Level

Discuss coating technologies that help maximize equipment uptime, process consistency, and component longevity.

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(937) 278-6547 [email protected] 4011 Riverside Drive, Dayton OH