Protecting Electronic Components Is Our Priority
For more than 25 years, APS Materials has partnered with semiconductor OEMs and second-source suppliers to apply thermal spray coatings for fabrication equipment, power electronics, and advanced manufacturing systems. Our coating technologies help minimize contamination, resist plasma attack, and maximize hardware longevity in highly controlled production environments.
A short look at how APS applies ceramic and specialty coatings to semiconductor and electronics components, from surface preparation through final inspection.
Common Components We Coat
This is a partial list of parts we can spray. Contact us for a quote or to inquire about our capabilities for specific parts.
- Baffles
- Bell Jars
- Bellows & Covers
- Depo Shields
- DPS Chambers
- Electrodes
- Electrostatic Chucks
- Pedestals
- Shutters & Sleeves
- Sputtering Targets
How Thermal Spray Supports Electronics Manufacturing
Corrosion and Plasma Resistance
High-purity ceramic coatings such as yttria and alumina create durable barriers against corrosive chemistries and aggressive plasma exposure. These coatings help preserve component integrity, stabilize process conditions, and reduce unplanned maintenance.
Particle Reduction and Contamination Control
Dense ceramic surfaces minimize particle generation, reduce coating degradation, and maintain surface integrity throughout repeated process cycles. Cleaner process chambers contribute to lower defect rates and improved manufacturing consistency.
Enhanced Dielectric Performance
Electrostatic chucks, RF hardware, and high-voltage assemblies rely on dielectric coatings for reliable operation. Thermal-sprayed ceramics provide electrical insulation, high breakdown voltage, and dependable performance under continuous use.
Longer Component Lifetimes and Reduced Costs
Thermal spray coatings help mitigate erosion, chemical attack, and surface degradation, reducing replacement frequency and lowering total ownership costs for semiconductor equipment.
Common Thermal Spray Coatings for Electronics Applications
- Alumina (Al₂O₃)
- Provides strong dielectric properties, thermal stability, and erosion resistance for semiconductor processing equipment and electrically insulating surfaces.
- Yttria (Y₂O₃)
- Offers excellent resistance to fluorine-based plasma chemistries and low particle generation in semiconductor etch applications.
- Alumina-Titania (Al₂O₃–TiO₂)
- Combines electrical insulation with increased toughness and wear resistance for components exposed to mechanical and process-related stresses.
- Boron Carbide (B₄C)
- Delivers exceptional hardness and erosion resistance in particle-intensive semiconductor processing environments.
- Yttria-Stabilized Zirconia (YSZ)
- Provides thermal shock resistance and stability under repeated thermal cycling and elevated operating temperatures.
Reliability at the Surface Level
Discuss coating technologies that help maximize equipment uptime, process consistency, and component longevity.
Aerospace
Our aerospace programs are supported by qualified processes, stringent quality standards, and decades of experience serving commercial aviation, defense, and spaceflight applications where reliability and repeatability are essential.
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Biomedical
As a long-standing supplier to the orthopedic implant industry, APS Materials develops and manufactures biomedical coatings for leading medical device companies, including seven of the world's ten largest manufacturers.
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Industrial
APS Materials, Inc. offers precision custom jobshop services, including high-performance coating, machining, and finishing solutions tailored to specifications, ensuring fast turnaround, consistent quality, and engineering expertise across diverse industrial applications.
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