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SPECIALIZED PROTECTION

Semiconductor/LCD

SEMICONDUCTOR WAFER PROCESSING REQUIRES A TIGHTLY-CONTROLLED ENVIRONMENT OFTEN INVOLVING HARSH, CORROSIVE CHEMICAL GASSES. APS MATERIALS HAS PARTNERED WITH LEADING ORIGINAL EQUIPMENT MANUFACTURERS (OEM) OF SEMICONDUCTOR EQUIPMENT SINCE 1994.

Protecting Semiconductors

Protection When it Counts

Manufacturing silicon wafers and semiconductors require a harsh environment. This abrasive environment dramatically shortens the life of chamber components used to house the process, threatening the quality of the highly sensitive products. The semiconductor industry knows that APS specializes in high-quality, highly-engineered spray coatings. We have over twenty-five years of experience developing protective coatings for semiconductor equipment along with a process flow that keeps the parts and coatings contaminant-free.

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Solutions for Semiconductors

The electrical resistance of a coating is a critical factor during wafer processing or LCD glass preparation when determining fab output quality. Without a high-quality coating, it’s only a matter of time before substrate corrosion causes downtime and leads to expensive replacement costs. APS developed several proprietary coatings used by OEMs and Second-Source suppliers. Protection of DPS upper body chambers, baffles, ball and gate valve components and all of your semiconductor equipment extends their life and improves their performance.

Solutions for Semiconductors

The electrical resistance of a coating is a critical factor during wafer processing or LCD glass preparation when determining fab output quality. Without a high-quality coating, it’s only a matter of time before substrate corrosion causes downtime and leads to expensive replacement costs. APS developed several proprietary coatings used by OEMs and Second-Source suppliers. Protection of DPS upper body chambers, baffles, ball and gate valve components and all of your semiconductor equipment extends their life and improves their performance.

Semi Conductor Products
DPS CHAMBERS & LINERS
BAFFLES
BALL VALVE COMPONENTS
BELL JARS (DOMES)
BELLOWS & COVERS
DEPOSITION SHIELDS & PVS LINER
ELECTRODES
ELECTROSTATIC CHUCKS (ESC)
FIXED CLIP RESTRAINTS
HARDWARE – FASTENERS
SHUTTERS & SLEEVES
ION BEAM IMPLANTATION MASKS
MAGNET PLATES & COVERS
PEDESTALS
QUARTZ
SHOWERHEADS (GDP)
SLIT VALVES
SPUTTERING TARGETS
VIEWPOINT/APERATURE WINDOWS
WAFER COATINGS
Save Time and Money

Deposits, corrosion, or erosion on semiconductor components will eventually result in downtime or loss of product. APS Materials Inc. is one of few organizations in the U.S. that utilizes Vacuum Plasma Systems to apply thin, highly-adhesive coatings which can be ground & lapped to extend life. No need to waste time and money on repairs when you could have just coated them in the first place. Our expertise is unsurpassed when it comes to protecting semiconductor equipment, including electrostatic chucks, fixed clip restraints, shutters and sleeves.

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READY TO GET STARTED?

APS provides lasting protection and restoration that keeps equipment moving. From Thermal sprays to Ceramic, Metallic, and CeraNode Coatings, APS has a solution. Get in touch today to see how APS can transform your business.

PROTECT & RESTORE